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Synonyms | Hafnium(IV) chloride; Hafnium tetrachloride; HfCl₄; Tetrachlorohafnium; HAFNIUMCHLORIDE |
Appearance | White to slightly yellow crystals |
Molecular Weight | 320.3 |
Melting Point | 432 °C |
Boiling Point | 315.47°C (estimate) |
Density | 3.89 g/cm3 |
Vapor Pressure | 1 mm Hg ( 190 °C) |
Solubility | Reacts with water |
Purity | ≥99.9% |
Analytical Methods | ICP-MS / ICP-OES / relevant assay method |
Package Information | 100g, 500g, 1kg, or customized |
Hafnium(IV) Chloride is highly sensitive to moisture. Exposure to humid air may cause hydrolysis and produce hydrogen chloride, hafnium oxychlorides, and other non-volatile residues that can affect product quality and vapor delivery.
For semiconductor-grade HfCl₄, quality control should cover not only overall purity, but also trace metals, zirconium content, particle condition, and batch consistency. A batch CoA can help customers evaluate whether the Hafnium Tetrachloride meets their process requirements.
Hafnium Tetrachloride is a well-established HfCl₄ ALD precursor used for depositing HfO₂ thin films. As a hafnium oxide precursor, it is mainly evaluated for:
High-k dielectric layers;
Logic device gate structures;
DRAM capacitor films;
ALD/CVD research and process development.
Stable precursor delivery depends on suitable source heating, dry handling, sufficient purging, and appropriate precursor-container design.
Hafnium(IV) Chloride is supplied in sealed, moisture-resistant packaging under controlled conditions. Standard and customized packaging options may include:
Glass or metal ampoules;
Customized solid-precursor containers;
Sample and bulk quantities;
Inert-atmosphere filling.
HfCl₄ should be stored tightly sealed in a dry, cool, and well-ventilated area. Opening and transfer should be carried out under suitably dry or inert conditions.
The standard Hafnium(IV) Chloride grade is ≥99.9%. Customized impurity specifications may be evaluated upon request.
HfCl₄ is handled and packaged under dry, controlled conditions to reduce hydrolysis during storage and delivery.
Yes. A batch-specific COA can be provided according to the agreed product specification.
Yes. Customized precursor ampoule filling can be evaluated according to the required volume, connection type, fill quantity, and delivery system.
For product analysis reports (such as COA) or procurement consulting, please feel free to contact us at jomin@wolfachem.com at any time.
