CAS: 908831-34-5 Chemical Formula: C6H17NSi Abbreviation: DIPAS
DIPAS is a liquid aminosilane precursor used for the low-temperature deposition of silicon-based dielectric thin films. Its vapor delivery characteristics and surface reactivity support thermal atomic layer deposition (Thermal ALD) and PEALD processes for depositing SiO₂ and SiNₓ, making it particularly suitable for applications requiring a reduced thermal budget and precise control over film growth.
Tetrakis(Dimethylamino) Hafnium is a low-melting-point hafnium precursor suitable for controlled vapor-phase delivery in ALD/CVD processes. Its melting point range of 26–29°C allows for mild source heating, while the chemical characteristics of its alkylamido groups facilitate the deposition of HfO₂ (for high-k dielectric layers) and other hafnium-based thin films.
Tetrakis(Ethylmethylamino) Hafnium is a liquid hafnium precursor designed for controlled vapor-phase delivery in ALD/CVD processes; it offers a practical technical approach for the fabrication of HfO₂ high-k dielectrics and Hf-Zr-O films that require precise control over precursor dosage and film composition.
Hafnium chloride is an important inorganic compound, typically appearing as a white to slightly yellow crystalline solid with high hygroscopicity. It is a key raw material in many industrial and scientific fields, widely used in ALD/CVD deposition, hafnium compound synthesis, and research applications.
2-(Cyclopenta-2,4-dien-1-yl)-N-methylpropan-1-amine, known as CIM, is a Cp-amine ligand intermediate for organozirconium precursor synthesis and ALD/CVD precursor development.
CAS: 35071-66-0 Chemical Formula/Abbreviation: C8H12
1-Isopropyl-1,3-cyclopentadiene is a colorless substituted cyclopentadiene liquid used as an iPrCp ligand precursor for organometallic compounds and specialty synthesis.
Fujian Wolfa Biotechnology Co., Ltd. is a global supplier of advanced organometallic precursors and high-purity specialty chemical materials, serving semiconductor, advanced manufacturing, and functional materials industries. We provide stable and scalable supply for high-performance applications.
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Our products have served customers in global innovation hubs such as the United States, Japan, South Korea, Switzerland, and India. Looking ahead, we will grow together with our partners, driving technological advancement with reliable materials and customized solutions.
Silicon Tetrachloride is volatile, but moisture ingress, hydrolysis, silica-like deposits, HCl corrosion, and cold spots can still cause vaporizer clogging in real delivery systems.
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