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ALD/CVD Precursor
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2,4-Dimethyl-1,3-Pentadiene
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2-(cyclopenta-2,4-dien-1-yl)-N-methylpropan-1-amine
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1-sopropyl-1,3-cyclopentadiene
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Bis(cyclopentadienyl)zirconium dichloride
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CAS 13282-39-8丨Zinci-propoxide
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Zirconium(IV) tert-butoxide
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Bis(cyclopentadienyl)hafnium dichloride
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Bis(2,2,6,6-tetramethyl-3,5-heptanedionato)nickel(II)
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Bis(2,4-Dimethylpentadienyl)ruthenium
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Tellurium Diethyl丨CAS 627-54-3
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(2-Methylcyclohexa-2,5-diene-1,4-diyl)bis(trimethylsilane)
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Tantalum Chloride
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CCTBA丨CAS 56792-69-9
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CpCo(CO)2丨CAS 12078-25-0
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TMA丨CAS 75-24-1
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Cobalt Carbonyl丨CAS 10210-68-1
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Tetracobalt Dodecacarbonyl丨CAS 17786-31-1
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Ta2(OEt)10丨CAS 6074-84-6
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TEMAZ丨CAS 175923-04-3
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TDEAZ丨CAS 13801-49-5
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