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ALD/CVD Precursor
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(2-Methylcyclohexa-2,5-diene-1,4-diyl)bis(trimethylsilane)
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2,4-Dimethyl-1,3-Pentadiene
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(3,3-Dimethyl-1-Butyne) Dicobalt Hexacarbonyl
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Dicarbonylcyclopen-Tadienyl Cobalt
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Trimethylaluminium丨CAS 75-24-1丨TMA
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Cobalt Carbonyl丨CAS 10210-68-1
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Tetracobalt Dodecacarbonyl丨CAS 17786-31-1
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Tantalum ethoxide丨CAS 6074-84-6
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Tetrakis (Ethylmethylamino) Zirconium
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Tetrakis(Diethylamino) Zirconium丨CAS 13801-49-5
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Tetrakis (Dimethylamino) Zirconium
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Tris(dimethylamino)Cyclopentadienyl Zirconium
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Zirconium Tetrachloride丨CAS 10026-11-6
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Tris(i-propylcyclopentadienyl)Yttrium
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Tris(Cyclopentadienyl) Yttrium
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Tris(Methylcyclopentadienyl) Yttrium
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Bis(isopropylcyclopentadienyl)Tungsten Dihydride
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Bis(tert-butylimino) Bis(dimethylamino) Tungsten
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Tungsten(Ⅴ) Chloride丨CAS 13470-14-9
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Tungsten(Ⅵ) Chloride丨CAS 13283-01-7
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