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ALD/CVD Precursor
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BTBMW丨CAS 406462-43-9
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Tungsten(Ⅴ) Chloride丨CAS 13470-14-9
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Tungsten(Ⅵ) Chloride丨CAS 13283-01-7
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Tungsten Hexacarbonyl丨CAS 14040-11-0
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Titanium Tetrachloride丨CAS 7550-45-0
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StarTi丨CAS 123927-75-3
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Trichloro(pentamethylcyclopentadienyl)titanium(IV)
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TDMAT丨CAS 3275-24-9
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PDMAT丨CAS 19824-59-0
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TDMASn丨CAS 1066-77-9
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HCDS丨CAS 13465-77-5
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Tetrachlorosilane丨CAS 10026-04-7
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TDMAS丨CAS 15112-89-7
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DIPAS丨CAS 908831-34-5
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BTBAS丨CAS 186598-40-3
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BDEAS丨CAS 27804-64-4
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CHORUS丨CAS 1015477-86-7
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Triruthenium Dodecacarbonyl丨CAS 15243-33-1
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Bis(Ethylcyclopentadienyl) Ruthenium
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Ni(dmamb)2丨CAS 942311-35-5
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