 |
| Synonyms | W(CO)6;Tungsten hexacarbonyl, sublimed, 99.9+% metals basis;Tungsten carbonyl 99%;Tungsten carbonyl (W(CO)6);TUNGSTEN CARBONYL |
| Appearance | Pale yellow to beige fine crystalline powder |
| Molecular Weight | 364 |
| Melting Point | 150 °C(lit.) |
| Boiling Point | 175 °C |
| Density | 2.65 g/mL at 25 °C(lit.) |
| Vapour Pressure | 1.2 mm Hg ( 67 °C) |
| Flash Point | 200°C |
| Solubility | Insoluble in water, soluble in organic solvents |
| Purity | 99%；99.99% |
| Storage Conditions | Store below +30°C |
| Package Information | 100g, 500g, 1kg, or customized |
Tungsten hexacarbonyl is a typical tungsten carbonyl compound that serves as a tungsten precursor in gas-phase deposition processes such as ALD, CVD, and EBID.
The W(CO)6 molecule contains no halogen ligands—such as fluorine or chlorine—making it suitable for thin-film deposition and materials research and development applications that require the evaluation of halogen-free tungsten sources.
W(CO)6 can be used in process research for tungsten films, tungsten oxide films, and tungsten-based nanostructures; it is particularly well-suited for precursor screening by customers in the semiconductor, micro/nano-fabrication, and advanced materials sectors.
Under suitable process conditions, tungsten hexacarbonyl can be used to introduce tungsten—via thermal decomposition or electron-beam-induced decomposition—for research into the preparation of tungsten films or tungsten-containing materials.
W(CO)₆ can serve as a tungsten CVD precursor for research into tungsten thin-film deposition. Tungsten films are of significant value in applications such as microelectronic interconnects, contact layers, barrier layers, and metallization structures.
Tungsten hexacarbonyl can be combined with oxygen sources such as water, ozone, or hydrogen peroxide to develop ALD or ALD-like processes for WOx or WO3 thin films, making it suitable for research into optoelectronics, sensing, and functional oxide thin films.
W(CO)6 is a common organometallic precursor used in EBID/FEBID; it is employed in the fabrication of tungsten-based micro- and nanostructures, localized conductive deposition, and research related to electron-beam nanofabrication.
Tungsten hexacarbonyl serves as a source of tungsten for the laboratory synthesis and process exploration of tungsten oxides, tungsten oxycarbides, tungsten complexes, and other functional tungsten-based materials.
Tungsten hexacarbonyl is an acutely toxic substance; ingestion, skin contact, or inhalation may be toxic. Avoid direct contact during handling, and do not weigh or transfer the substance without proper protection.
Metal carbonyl compounds may release carbon monoxide when heated, decomposed, or exposed to fire. Operations involving heating, sublimation, CVD precursor supply, or exhaust gas treatment require adequate ventilation, exhaust gas treatment systems, and necessary CO monitoring measures.
Tungsten hexacarbonyl should be stored in a sealed container in a dry, cool, and well-ventilated place, avoiding container damage and contamination.
W(CO)6 should be kept away from strong oxidizing agents to prevent uncontrolled reactions. Storage alongside oxidizing agents, highly reactive chemicals, or high-temperature heat sources is not recommended.
In the event of accidental inhalation of dust, fumes, or decomposition products, immediately move the person to an area with fresh air, ensure comfortable breathing, and contact a doctor or poison control center as soon as possible.
If the substance enters the eyes, rinse immediately with plenty of water; remove contact lenses if necessary, continue rinsing, and seek medical attention. The work area should be equipped with an eyewash station and safety shower facilities.
1. Does W(CO)₆ turning yellow during storage mean it has failed?
Yellowing usually indicates that the product has begun to decompose, possibly due to exposure to air, light, or high temperatures. Slight discoloration may not affect some applications, but for demanding applications such as semiconductor deposition, it is recommended to repurify or use a new batch to ensure process stability.
2. Is tungsten hexacarbonyl toxic?
Yes, it decomposes when heated to produce toxic carbon monoxide gas. Handling must be done in a well-ventilated environment with protective equipment.
3. Can it be used as a substitute for other metal carbonyl groups?
It can be used in some applications, such as studying the electronic structure of carbonyl complexes, but its unique chemical properties require determination of its feasibility based on experimental needs.
4. What is tungsten hexacarbonyl [W(CO)6] primarily used for?
W(CO)6 is primarily used as a precursor for tungsten. It finds application in the deposition of tungsten films via CVD, tungsten oxide thin films via ALD, and tungsten-based micro/nanostructures via EBID, as well as in the research and development of tungsten-based complexes and functional materials.
5. What is the difference between W(CO)6 and WF6?
W(CO)6 is a halogen-free tungsten carbonyl precursor, whereas WF6 is a fluorine-containing tungsten precursor. They differ in terms of reaction mechanisms, corrosivity, deposition conditions, and equipment compatibility. Customers should make their selection based on the target film, impurity control requirements, and equipment compatibility.
6. What specifications should be considered when purchasing tungsten hexacarbonyl?
When sourcing the material, it is advisable to focus on purity, appearance, metal impurities, non-volatile residue, particle control, batch consistency, packaging integrity, the Certificate of Analysis (CoA), the Safety Data Sheet (SDS), and shipping conditions. For applications involving electronic materials, packaging cleanliness and compatibility with feed systems should also be considered.
Wolfa professionally supplies Tungsten hexacarbonyl, supporting small-batch sampling and large-volume procurement needs. Packaging options include ordinary glass bottles, glass ampoules, metal ampoules, etc.
For product analysis reports (such as COA) or procurement consulting, please feel free to contact us at jomin@wolfachem.com at any time.
