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Tris(dimethylamino)silane丨CAS 15112-89-7

CAS: 15112-89-7
Chemical Formula/Abbreviation: TDMAS

Tris(dimethylamino)silane not only has good stability and high vapor pressure, but also exhibits considerable reactivity. Therefore, it is widely used as a precursor source in current ALD method for SiO2 deposition research.
 
Synonyms: TDMAS, 3DMAS, LS 1460, amino)siL, (Me2N)3SiH, 3DMAS : [(CH3)2N]3SiH, Tris(dimethyamino)silane, Tri(dimethylamino)silane, TRIS(DIMETHYLAMINO)SILANE, Tris(dimethylamido)silane
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Tris(dimethylamino)silane Basic Properties

Molecular Formula C6H19N3Si
Appearance Colorless to pale yellow liquid
Molecular Weight 161.32
Melting Point <0°C
Boiling Point 145 °C
Density 0,838 g/cm3
Refractive Index 1.4247
Flash Point 25°C
Acidity Coefficient (pKa) 10.93±0.70(Predicted)
Sensitivity Sensitive to air and humidity
Purity ≧98%
Package Information 100g, 500g, 1kg, or customized


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