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ALD/CVD Precursor
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Tellurium Diethyl丨CAS 627-54-3
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2,4-Dimethyl-1,3-Pentadiene
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(2-Methylcyclohexa-2,5-diene-1,4-diyl)bis(trimethylsilane)
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Tantalum Chloride
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CCTBA丨CAS 56792-69-9
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CpCo(CO)2丨CAS 12078-25-0
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TMA丨CAS 75-24-1
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Cobalt Carbonyl丨CAS 10210-68-1
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Tetracobalt Dodecacarbonyl丨CAS 17786-31-1
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Ta2(OEt)10丨CAS 6074-84-6
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TEMAZ丨CAS 175923-04-3
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TDEAZ丨CAS 13801-49-5
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TDMAZ丨CAS 19756-04-8
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CpZr丨CAS 33271-88-4
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Zirconium Tetrachloride丨CAS 10026-11-6
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Y(iPrCp)3丨CAS 130206-63-2
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YCp3丨CAS 1294-07-1
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Y(MeCp)3丨CAS 329735-72-0
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W(i-PrCp)2H2丨CAS 64561-25-7
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BTBMW丨CAS 406462-43-9
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