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ALD/CVD Precursor
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Organometallic Catalyst
Tungsten(Ⅴ) Chloride丨CAS 13470-14-9
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Tungsten(Ⅵ) Chloride丨CAS 13283-01-7
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Tungsten Hexacarbonyl丨CAS 14040-11-0
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Triruthenium Dodecacarbonyl丨CAS 15243-33-1
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Molybdenum Hexacarbonyl丨CAS 13939-06-5
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Chromium Hexacarbonyl丨CAS 13007-92-6
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Cobalt Carbonyl丨CAS 10210-68-1
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Niobium(V) chloride丨CAS 10026-12-7
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Chromocene丨CAS 1271-24-5
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Yttrium(III) Isopropoxide丨CAS 2172-12-5
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Copper(I) Thiophenolate丨CAS 1192-40-1
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Osmium Carbonyl丨CAS 15696-40-9
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Manganese Carbonyl丨CAS 10170-69-1
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Tetrakis (Triphenylphosphine) Nickel丨CAS 15133-82-1
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Scandium Chloride Tetrahydrofuran Complex丨CAS 14782-78-6
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Tetrachlorobis(Tetrahydrofuran) Titanium丨CAS 31011-57-1
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Rhodium Chloride Hydrate丨CAS 20765-98-4
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Tetracobalt Dodecacarbonyl丨CAS 17786-31-1
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Chromium(III) Trichloride丨CAS 10025-73-7
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Chromium Chloride Tetrahydrofuran Complex丨CAS 10170-68-0
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